Introduction To EFU Equipment
In recent years, with the rapid development of the panel and semiconductor industries, the demand for terminal purification in clean rooms and micro-environment equipment is increasing, and the requirements are getting higher and higher. Among them, the equipment-side fan filter unit EFU has entered everyone's field of vision in recent years. Most EFUs are imported from abroad with random sets of equipment, which have long delivery times and high prices, which are their disadvantages. Meiai is committed to the research and development of cutting-edge purification equipment. Over the years, it has invested a lot of manpower and material resources, learned international cutting-edge technologies, and independently innovated based on project needs.
The full English name of EFU is Equipment Fan Filter Unit, which is the equipment fan filter unit. It is very similar to our common FFU (Fan Filter Unit) fan filter unit, so what is the difference between the two? First, the applicable places are different. FFU is generally used on the factory side, that is, installed on the ceiling of a clean room. The EFU/equipment-side fan filter unit, as the name suggests, is installed on machine equipment or micro-environment equipment in the clean room, such as photolithography machines, STOCKER, LUL (INDEXER), COATER, cleaning machines, etc. Second, the installation methods of EFU and FFU are different. FFU is generally a split design. The equipment uses its own weight, filter and ceiling keel to achieve sealed installation. The usual installation form is horizontal installation. The installation method of EFU is relatively complicated. There are mainly two forms: horizontal installation and vertical installation. The box and filter are usually fixed and connected together with bolts and nuts. A special installation bracket and bolts and nuts are used between the EFU machine and the machine. Fixed and firmly connected. In addition, the thickness dimensions, maintenance methods, control systems, working parameters, material requirements, etc. of EFU equipment are all different from FFU.
Carry out environmental improvement analysis for old machine equipment, upgrade the clean system, improve the existing environment to meet the needs of process production, rejuvenate old machines and improve product yields. Case studies on renovation and upgrading of old machines
Large air volume/low vibration/low noise/high efficiency
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